Thickness Measurements below the Rayleigh Depth Resolution Limit Using Frequency-Modulated Continuous-Wave Millimeter and Terahertz Waves
- The nondestructive testing of multilayered materials is increasingly applied in
both scientific and industrial fields. In particular, developments in millimeter
wave and terahertz technology open up novel measurement applications, which
benefit from the nonionizing properties of this frequency range. One example is
the noncontact inspection of layer thicknesses. Frequently used measuring and
analysis methods lead to a resolution limit that is determined by the bandwidth
of the setup. This thesis analyzes the reliable evaluation of thinner layer thicknesses
using model-based signal processing.